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CONDUCTIVE COMPOSITE, RESIST COATING MATERIAL, RESIST, AND RESIST PATTERN FORMATION METHOD

机译:导电复合材料,抗蚀剂涂层材料,抗蚀剂和抗蚀剂图案形成方法

摘要

Provided is a conductive composite having excellent conductivity and being capable of forming a conductive film that leads to less film loss of a resist layer. This conductive composite contains a conductive polymer and a surfactant. When the critical micelle concentration of the surfactant is less than 0.1 mass%, the content of the surfactant is at least 5 parts by mass to 100 parts by mass of the conductive polymer. When the critical micelle concentration of the surfactant is at least 0.1 mass%, the content of the surfactant is more than 100 parts by mass to 100 parts by mass of the conductive polymer.
机译:提供了一种导电复合材料,其具有优异的导电性并且能够形成导电膜,导致抗蚀剂层的薄膜损失较少。该导电复合材料含有导电聚合物和表面活性剂。当表面活性剂的临界胶束浓度小于0.1质量%时,表面活性剂的含量为至少5质量份至100质量份的导电聚合物。当表面活性剂的临界胶束浓度为至少0.1质量%时,表面活性剂的含量大于100质量份至100质量份的导电聚合物。

著录项

  • 公开/公告号WO2021153678A1

    专利类型

  • 公开/公告日2021-08-05

    原文格式PDF

  • 申请/专利权人 MITSUBISHI CHEMICAL CORPORATION;

    申请/专利号WO2021JP03062

  • 发明设计人 NAKANO SAKI;MORI TAKAHIRO;

    申请日2021-01-28

  • 分类号C08L101/12;G03F7/20;H01B1/20;H01L21/027;

  • 国家 JP

  • 入库时间 2022-08-24 20:22:59

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