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HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATIONS
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATIONS
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机译:用于半导体应用的高纯度堇青石材料
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摘要
Disclosed is a cordierite sintered body comprising from 90 to 98% by volume of a cordierite crystal phase as measured using x ray diffraction, SEM and image processing methods wherein the cordierite sintered body has at least one surface comprising pores having a diameter of from 0.1 to 5 um as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or greater, and volumetric porosity of less than about 4%. Methods of making the cordierite sintered body are also disclosed.
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