Electroplated silicon based electron tobacco atomized core chip and its manufacturing method

摘要

A silicon based electronic cigarette atomized core chip (103) and a method of manufacturing the sameA silicon substrate (1);An array of Micropillars (2) or an array of microholes (3), an entrance end (13) and an outlet end (14) are provided on a silicon substrate (1);The outer wall of the micropillar (2) is plated coated sidewalls.The inner wall of the microhole (3) is the plated coated inner wall;The array of Micropillars (2) defines several microfluidic channelsOrA tobacco liquid channel (15) is provided on the silicon substrate (1) through the microholeSilicon substrate (1) andGlass cover (5);The glass cover (5) is provided with a vent hole (6) through the glass coverGlass coverIt is fixed to the silicon substrate (1) using the joining techniqueElectronic cigarette atomized core chip and its manufacturing method.The plating coated silicon based electronic tobacco atomized core chip (103) selects silicon as the base material of the atomized core chip, is cheap and reduces the cost of manufacturing electronic tobacco atomized core chips and is useful for mass production.Diagram