Process, particle beam system and computer program product for energy dispersive X-ray spectroscopy

摘要

The present invention relates to a method, a particle beam system and a computer program product for energy-dispersive X-ray spectroscopy of an object (25). The method comprises: scanning a particle beam (13) over a scanning area of an object (25), as a result of which charged particles (43, 54) are emitted from the scanning area of the object (25) on the one hand and X-rays (53) are emitted on the other; Detecting the charged particles (43, 54) emitted from the raster area of the object (25) with a particle detector (17, 48) for detecting the charged particles; Generating an image of the raster area based on the particles (43, 54) detected with the particle detector (17, 48); Detecting at least the x-ray radiation (53) emitted by a partial area of the raster area with an energy-dispersive x-ray detector (47); Generating a representation of an energy-dispersive X-ray spectrum based on that part of the detected X-ray radiation (53) which is emitted by the object (25) over the partial area of the grid area due to the scanning of the particle beam (13), the partial area being smaller in area than the grid area.