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Electrode forming method and electrode forming apparatus for organic thin film transistor, manufacturing method of organic thin film transistor and organic thin film transistor
Electrode forming method and electrode forming apparatus for organic thin film transistor, manufacturing method of organic thin film transistor and organic thin film transistor
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机译:用于有机薄膜晶体管的电极形成方法和电极形成装置,有机薄膜晶体管的制造方法和有机薄膜晶体管
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摘要
For the purpose of providing a technology capable of forming an electrode without a step difference with the simpler manufacturing processElectrode forming method for organic thin film transistor according to the present invention and manufacturing method of organic thin film transistorA step of preparing a base layer formed by an electrically insulating resin material (step S102) andA coating solution containing a solvent for softening a resin material constituting a base layer and an electrically conductive electrode materialThe step of applying a partial coating to the surface of the base layer with a pattern corresponding to the electrode shape (step S104);The process of pressing the solidified coating liquid against the base layer (step S104)The step of forming the electrode by volatilizing the solvent to solidify the coating liquid (step S105).
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