LASER OPTICAL ARRANGEMENT FOR LASER INTERFERENCE PROCESSING, IN PARTICULAR LASER STRUCTURING OF SURFACES

摘要

The invention relates to a laser optical arrangement for laser interference processing, in particular for laser structuring, in which one of a laser beam source (1) emitted laser beam (A) with at least one beam splitter (BS1) in at least two partial beams (B1, B2) is divided and the partial beams (B1 , B2) are directed onto reflective elements (M1, M2) and at least one further beam splitter (BS2) in such a way that at least two partial beams (C and D) interfering with each other act on a surface of a substrate (S) to be machined and / or a second beam path (7) hit. At least one of the beam splitters (BS1, BS2) or at least one of the reflecting elements (M1, M2) is at an angle θ of 45 °, perpendicular to the optical axis of a partial beam (B1, B2), in which the beam splitters (BS1, BS2 ) and reflective elements (M1, M2) in relation to the respective optical axis of the laser beam (A) or the respective sub-beam (B1, B2) are aligned, pivoted or pivoted, so that a phase difference between the interfering sub-beams (C, D) can be achieved is and the sub-beams (B1, B2) from the beam path in the partial beams (B1, B2), starting from the first beam splitter (BS1) last arranged beam splitter (BS2) interfere.