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Vanadium silicon nitride film, member coated with vanadium silicon nitride film and method for manufacturing the same
Vanadium silicon nitride film, member coated with vanadium silicon nitride film and method for manufacturing the same
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机译:钒氮化硅膜,涂有钒氮化硅膜的构件及其制造方法
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摘要
A vanadium silicon nitride film formed as a hard film to a base material satisfies 0.30≤a/b≤1.7 and 0.24≤b≤0.36 when a=vanadium element concentration [at %]/(vanadium element concentration [at %]+silicon element concentration [at %]+nitrogen element concentration [at %]) and b=silicon element concentration [at %]/(vanadium element concentration [at %]+silicon element concentration [at %]+nitrogen element concentration [at %]), and has a hardness of 2300 HV or more.
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