Chemical modification of hardmask films for enhanced etching and selective removal

摘要

Embodiments include a method of processing a hardmask comprising forming an alloyed carbon hardmask over an underlying layer. In an embodiment, the alloyed carbon hardmask is alloyed with metallic-carbon fillers. Embodiments further include patterning the alloyed carbon hardmask and transferring the pattern of the alloyed carbon hardmask to the underlying layer. According to an embodiment, the method may further include removing the metallic component of the metallic-carbon fillers from the alloyed carbon hardmask to form a porous carbon hardmask. Thereafter, the porous hardmask can be removed. In an embodiment, removing the metallic component of the metallic-carbon fillers may include flowing a processing gas into the chamber to volatilize the metallic component of the metallic-carbon fillers.