PURIFYING REAGENT APPARATUS FOR OBTAINING ULTRAPURE NITRIC ACID

摘要

The present invention relates to a reagent purification apparatus for obtaining ultra-high purity nitric acid, and the present invention relates to a reagent supply unit filled with a reagent in a liquid state; a housing having an inner space to receive the reagent supplied from the reagent supply unit; a heater for evaporating the reagent inside the housing; a cooling unit for liquefying the reagent evaporated by the heater unit in the housing; and a reagent collecting unit for collecting the cooled and liquefied reagent, wherein the housing includes: a passage connecting one side and the other facing the other side and configured to communicate with an external space so as to be separated from the internal space; may further include. Since the present invention employs a simple configuration, ultra-high purity nitric acid can be obtained very inexpensively and simply.