Equipment for evaluation of length measurement error of X-ray CT equipment for three-dimensional shape measurement

摘要

In order to capture the spatial distortion inherent in the X-ray CT apparatus without shortage and evaluate the three-dimensional shape measurement accuracy of the X-ray CT apparatus, in the object 30, the support rods 36, 37 having different lengths of the sphere 35 fixed to the tip thereof, By attaching 38 to the base 31, 15 balls 35 are arranged in the XYZ space on the base 31. Support rods 36, 37, 38 having different lengths for supporting the ball 35 are arranged at predetermined intervals on the flat surface 32 on the upper part of the base 31. Thus, the spheres 35 are arranged in the XYZ space at an appropriate distance between the spheres.