Equipment for evaluation of length measurement error of X-ray CT equipment for three-dimensional shape measurement

摘要

To provide equipment for length measurement error estimation of an X-ray CT apparatus for three-dimensional shape measurement that does not change the sphere position even when a considerable amount of external force such as a contact of a probe is applied to a sphere or a support rod or even when the equipment is tilted or is turned upside down during movement.SOLUTION: In order to catch the space distortion specific to an X-ray CT apparatus without shortage and evaluate the three-dimensional shape measurement accuracy of the X-ray CT apparatus, in equipment 30, support rods 36, 37, and 38 that have spheres 35 fixed to respective tips and have different lengths are attached to a base 31, thus 15 sphere 35 are arranged in the XYZ space on the base 31. On a flat surface 32 on the upside of the base 31, support rods 36, 37, and 38 that support the spheres 35 and have different lengths are arranged in a predetermined interval. Thus, the spheres 35 are arranged in the XYZ space at an appropriate distance.SELECTED DRAWING: Figure 2