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RAPID LARGE-SCALE FABRICATION OF METASURFACES WITH COMPLEX UNIT CELLS
RAPID LARGE-SCALE FABRICATION OF METASURFACES WITH COMPLEX UNIT CELLS
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机译:快速大规模制造具有复杂单元电池的元件
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摘要
A method of fabricating a metasurface comprises coating a photoresist film onto a substrate and loading the coated substrate into a laser interference lithography setup, exposing the photoresist film via a laser with a first interference pattern, the first interference pattern having a first period and a first exposure energy, subsequently exposing the coated substrate with a second interference pattern, the second interference pattern having a second period and a second exposure energy, developing the exposed portions of the photoresist film to form a periodic pattern in the photoresist, and transferring the periodic pattern into the substrate, the substrate supporting an appropriate film system that embodies the final metasurface device.
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