Frequency tracking for subsurface atomic force microscopy

摘要

A method and system for performing subsurface atomic force microscopy measurements, the system comprising: a signal source for generating a drive signal; a transducer configured to receive the drive signal to convert the drive signal to vibration waves for interaction with subsurface features in the sample and to couple the vibration waves to a stack comprising the sample; a cantilever tip contacting the sample to measure a surface displacement due to vibrational waves to determine subsurface features, the system comprising: measuring a measurement signal returning from the transducer during and/or between subsurface atomic force microscopy measurements; including measuring instruments for