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Method for increasing scanning speed of scanning probe microscope and scanning probe microscope in step in scan mode
Method for increasing scanning speed of scanning probe microscope and scanning probe microscope in step in scan mode
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机译：增加扫描探针显微镜扫描速度和扫描模式下扫描探针显微镜的方法
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摘要
The present invention includes (a) a scanning unit (555) embodied to scan the measurement probe (400) across the sample surface (515) in step-in scanning mode, and (b) the measurement probe during step-in scanning mode. The present invention relates to a scanning probe microscope (500) having a self-oscillating circuit arrangement (590, 790) embodied to excite (400) to natural vibration (1050). [Selection] Figure 10
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