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Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system
Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system
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机译:用于监督FD系统的无监督故障检测(FD)系统的经济高效转换的装置
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摘要
Techniques are provided for classifying runs of a recipe within a manufacturing environment. Embodiments monitor a plurality of runs of a recipe to collect runtime data from a plurality of sensors within a manufacturing environment. Qualitative data describing each semiconductor devices produced by the plurality of runs is determined. Embodiments characterize each run into a respective group, based on an analysis of the qualitative data, and generate a data model based on the collected runtime data. A multivariate analysis of additional runtime data collected during at least one subsequent run of the recipe is performed to classify the at least one subsequent run into a first group. Upon classifying the at least one subsequent run, embodiments output for display an interface depicting a ranking sensor types based on the additional runtime data and the description of relative importance of each sensor type for the first group within the data model.
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