首页> 外国专利> WAVEGUIDE-CONFINING LAYER WITH GAIN MEDIUM TO EMIT SUBWAVELENGTH LASERS, AND METHOD TO FORM SAME

WAVEGUIDE-CONFINING LAYER WITH GAIN MEDIUM TO EMIT SUBWAVELENGTH LASERS, AND METHOD TO FORM SAME

机译:具有增益介质的波导限制层发射亚波长激光器,以及形成该的方法

摘要

Embodiments of the disclosure provide a waveguide-confining layer, a photonic integrated circuit (PIC) die with embodiments of a waveguide-confining layer, and methods to form the same. The waveguide-confining layer may include an oxide layer over a buried insulator layer, a silicon-based optical confinement structure embedded within or positioned on the oxide layer, and first and second blocking layers over the oxide layer and separated from each other by a horizontal slot. The first and second blocking layers include a metal or an oxide. A gain medium is positioned on the oxide layer and within the horizontal slot between the first and second blocking layers, and has a lower refractive index than each of the first and second blocking layers. The gain medium is vertically aligned with the silicon-based optical confinement structure, and a portion of the oxide layer separates the gain medium from the silicon-based optical confinement structure.
机译:本公开的实施例提供了一种波导限制层,光子集成电路(PIC)与波导限制层的实施例,以及形成该的方法。波导限制层可包括掩埋绝缘体层上的氧化物层,嵌入在氧化物层内或位于氧化物层上或位于氧化物层上的硅基光限制结构,并通过水平彼此分离投币口。第一和第二阻挡层包括金属或氧化物。增益介质位于氧化物层上,并且在第一和第二阻挡层之间的水平槽内,并且具有比第一和第二阻挡层中的每一个的折射率较低。增益介质与基于硅基光学限制结构垂直对齐,并且氧化物层的一部分与基于硅的光学限制结构分离增益介质。

著录项

  • 公开/公告号US2021194201A1

    专利类型

  • 公开/公告日2021-06-24

    原文格式PDF

  • 申请/专利权人 GLOBALFOUNDRIES U.S. INC.;

    申请/专利号US201916718329

  • 发明设计人 YUSHENG BIAN;AJEY POOVANNUMMOOTTIL JACOB;

    申请日2019-12-18

  • 分类号H01S3/02;H01S3/16;

  • 国家 US

  • 入库时间 2022-08-24 19:30:58

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