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Shielding member including a plurality of shielding plates arranged without gaps therebetween in plan view and apparatus for growing single crystals
Shielding member including a plurality of shielding plates arranged without gaps therebetween in plan view and apparatus for growing single crystals
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机译:屏蔽构件,包括多个屏蔽板布置,在没有间隙的情况下,在平面图和用于生长单晶的装置中
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摘要
A shielding member includes a plurality of shielding plates, in which the plurality of shielding plates are arranged without gaps therebetween in a plan view from a crystal installation part, and the shielding member is disposed between a source material accommodation part and the crystal installation part, in an apparatus for growing single crystals, wherein the apparatus includes a container for crystal growth that has the source material accommodation part at an inner bottom part, and has the crystal installation part that faces the source material accommodation part, and includes a heating part that is configured to heat the container for crystal growth, in which a single crystal of the source material is grown on a crystal installed in the crystal installation part by subliming the source material from the source material accommodation part.
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