BULK ACOUSTIC WAVE RESONATOR WITH ELECTRODE HAVING VOID LAYER, FILTER AND ELECTRONIC DEVICE

摘要

The present invention relates to a bulk acoustic wave resonator, comprising: a base; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer arranged between the bottom electrode and the top electrode, wherein: the bottom electrode and/or the top electrode is gap electrode, the gap electrode has a void layer, the upper side of the void layer has an upper electrode layer, the lower side of the void layer has a lower electrode layer, the void layer is arranged between the upper electrode layer and the lower electrode layer in the thickness direction of the resonator, the upper electrode layer and the lower electrode layer are electrically connected in parallel with each other at both ends of the void layer; one electrode layer of the upper electrode layer and the lower electrode layer is an arc-shaped electrode layer having a radian away from the other electrode layer of the upper electrode layer and the lower electrode layer in the thickness direction of the resonator. The present invention further relates to a filter having the above resonator and an electronic device having the filter or the resonator.