An ultrasonic transverse wave is transmitted or ultrasonic longitudinal wave and transverse wave are transmitted in a perpendicular direction to a bonding interface between materials by transmission such as a probe. A reflection signal of the transmitted transverse wave reflected by the bonding interface and/or a transmission signal of the transmitted transverse wave transmitted through the bonding interface and the longitudinal wave, a reflection signal of the transmitted longitudinal wave reflected by the bonding interface and/or a transmission signal of the transmitted longitudinal wave transmitted through the bonding interface are received by reception such as the probe. A physical quantity of the reflection signal or the transmission signal of the transverse wave, out of the received signals, and the longitudinal wave, a joined state of the bonding interface is evaluated by analysis evaluation, utilizing a predetermined physical quantity of the reflection signal or the transmission signal of the longitudinal wave.
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