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GALLIUM ARSENIDE SINGLE CRYSTAL, AND GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATE

机译:砷化镓单晶和砷化镓单晶衬底

摘要

There is provided a gallium arsenide single crystal including a straight body portion having a cylindrical shape, wherein a residual strain in a tangential direction in an outer circumferential portion is a compressive strain, the outer circumferential portion extending between an inner circumferential surface located 10 mm inward from an outer circumferential surface of the straight body portion toward a central axis and a location located 5 mm inward from the outer circumferential surface. There is also provided a gallium arsenide single crystal substrate, wherein a residual strain in a tangential direction in an outer circumferential portion is a compressive strain, the outer circumferential portion extending between an inner circumference located 10 mm inward from an outer circumference toward a center and a location located 5 mm inward from the outer circumference.
机译:提供了一种砷化镓单晶,其包括具有圆柱形状的直的主体部分,其中在外圆周部分中的切向方向上的残余应变是压缩应变,外周部分延伸在10mm向内10mm的内周表面之间延伸的外圆周部分从直的主体部分的外周表面朝向中心轴线和从外圆周表面向内5mm的位置。还提供了一种砷化镓单晶基板,其中在外圆周部分中的切向方向上的残余应变是压缩应变,外周部分在从外圆周向内10mm的内圆周延伸到中心和位于从外圆周向内5mm的位置。

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