Manufacturing method of single crystal diamond, single crystal diamond composite and single crystal diamond substrate

摘要

To provide a method of manufacturing a single crystal diamond such that it is easy to handle a seed substrate and productivity is high.SOLUTION: A method of manufacturing a single crystal diamond comprises the processes of: forming a metal film in which carbon can be solid-dissolved linearly on a principal surface of a seed substrate of the single crystal diamond; forming a groove on the principal surface by thermally treating the seed substrate in a gas of a molecule including at least one of a hydrogen atom and an oxygen atom and thus corroding the seed crystal with the metal film; and forming, by a chemical vapor-deposition growing method, a single diamond layer on a region where the metal film is not formed on the principal surface; after forming the groove.SELECTED DRAWING: Figure 1