Method of, and apparatus for, reducing photoelectron yield and/or secondary electron yield

摘要

A method of reducing photoelectron yield (PEY) and/or secondary electron yield (SEY) of a surface of a target (10), comprises applying laser radiation to the surface of the target (10) to produce a periodic arrangement of structures on the surface, wherein the laser radiation comprises pulsed laser radiation comprising a series of laser pulses and the power density of the pulses is in a range 0.01 TW/cm² to 3 TW/cm², optionally 0.1 TW/cm² to 3 TW/cm².