MANUFACTURING METHOD OF GAS SENSOR BASED ON CARBON NANOTUBE AND GAS SENSOR BASED ON CARBON NANOTUBE

摘要

The present invention relates to a method of manufacturing a carbon nanotube-based gas sensor and a carbon nanotube-based gas sensor, and more particularly, to a method for manufacturing a carbon nanotube-based gas sensor, comprising: preparing an upper substrate in which a plurality of bundled carbon nanotubes are aligned; preparing a lower substrate on which a pair of sensing electrodes spaced apart from each other and facing each other are formed; and disposing the upper substrate on the lower substrate such that the plurality of bundled carbon nanotubes are positioned across the pair of sensing electrodes. Including, wherein the plurality of bundled carbon nanotubes are aligned across a hole formed in the upper substrate, a method for manufacturing a carbon nanotube-based gas sensor and a carbon nanotube-based gas sensor it's about