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Gas cooled minimum contact area (MCA) electrostatic chuck (ESC) for aluminum nitride (AlN) PVD process
Gas cooled minimum contact area (MCA) electrostatic chuck (ESC) for aluminum nitride (AlN) PVD process
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机译:用于氮化铝(ALN)PVD工艺的气体冷却最小接触面积(MCA)静电卡盘(ESC)
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摘要
Embodiments of the disclosure include an electrostatic chuck assembly, a processing chamber and a method of maintaining a temperature of a substrate is provided. In one embodiment, an electrostatic chuck assembly is provided that includes an electrostatic chuck, a cooling plate and a gas box. The cooling plate includes a gas channel formed therein. The gas box is operable to control a flow of cooling gas through the gas channel.
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