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Electronic chip manufacturing process

机译:电子芯片制造工艺

摘要

Electronic chip manufacturing processThe specification relates to a method for manufacturing an electronic chip, which comprises the following steps: (a) forming on the top side of a semiconductor substrate (11),A plurality of integrated circuits are formed on the integrated circuits, and grooves separating the integrated circuits are formed on the integrated circuits;(b) On one side of the upper surface of the substrate (11), at least one metal post (19) is deposited on each integrated circuit,Contact with the top surface of integrated circuit,And resin (23),Extending to the groove and the top surface of the integrated circuit;(c) Formed from the top surface of the resin (23),An opening toward the groove having a width greater than or equal to the width of the groove so as to make the side face (191) of at least one pillar (19) of each integrated circuit clear;And (d) cutting to separate the integrated circuit separately.Abstract figure: Figure 10
机译:电子芯片制造工艺本说明书涉及一种用于制造电子芯片的方法,其包括以下步骤:(a)在半导体衬底(11)的顶侧上形成,在集成电路上形成多个集成电路,并且凹槽分离集成电路形成在集成电路上;(b)在基板(11)的上表面的一侧,在每个集成电路上沉积至少一个金属柱(19),与集成电路的顶表面接触,和树脂(23),延伸到凹槽和集成电路的顶表面;(c)由树脂(23)的顶表面形成,朝向宽度大于或等于宽度的凹槽的开口凹槽以使每个集成电路的至少一个柱(19)的侧面(191)清晰;(d)切割以分别分离集成电路。摘要图:图10

著录项

  • 公开/公告号FR3104316A1

    专利类型

  • 公开/公告日2021-06-11

    原文格式PDF

  • 申请/专利权人 STMICROELECTRONICS (TOURS) SAS;

    申请/专利号FR20190013746

  • 发明设计人 LUDOVIC FALLOURD;CHRISTOPHE SERRE;

    申请日2019-12-04

  • 分类号H01L21/60;H01L21/822;

  • 国家 FR

  • 入库时间 2022-08-24 19:09:44

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