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Electronic chip manufacturing process

机译:电子芯片制造工艺

摘要

Electronic chip manufacturing processThis specification relates to an electronic chip manufacturing process, including the following steps:A metallization connecting adjacent integrated circuit contacts (13) is formed on the first surface side of the semiconductor substrate (11), and a plurality of integrated circuits (13) are formed on the first surface of the semiconductor substrate (11); andA first groove (21) is formed on the first surface side of the substrate (11) to laterally separate the integrated circuits (13), and the metallization connecting the adjacent integrated circuits (13) is cut to form at least a part of the metallization (19 ') on each adjacent circuit (13).Abstract figure: Figure 10
机译:电子芯片制造工艺本说明书涉及一种电子芯片制造过程,包括以下步骤:连接相邻的集成电路触头(13)的金属化形成在半导体衬底(11)的第一表面侧上,并且在半导体衬底(11)的第一表面上形成多个集成电路(13);和第一凹槽(21)形成在基板(11)的第一表面侧上,以横向分离集成电路(13),并且将连接相邻的集成电路(13)的金属化被切割以形成至少一部分每个相邻电路(13)的金属化(19')。摘要图:图10

著录项

  • 公开/公告号FR3104317A1

    专利类型

  • 公开/公告日2021-06-11

    原文格式PDF

  • 申请/专利权人 STMICROELECTRONICS (TOURS) SAS;

    申请/专利号FR20190013744

  • 发明设计人 MICHAEL DE CRUZ;OLIVIER ORY;

    申请日2019-12-04

  • 分类号H01L21/60;H01L21/822;

  • 国家 FR

  • 入库时间 2022-08-24 19:09:44

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