Base material conveying device and substrate processing apparatus

摘要

Problem to be solved: to provide a substrate transporting apparatus capable of removing slack of a long strip like strip and a substrate treating apparatus having this substrate carrying apparatus.The substrate carrier 1 has a first clamp 5, a second clamp 6, and a loosening removal unit 10.The slack removing unit 10 has a plurality of base member pressing members 17, and one of the plurality of base member pressing members 17 applies a pressing force to the base material 2 when the first clamp 5 and the second clamp 6 sandwich the base material 2.This makes it possible to apply tension to the substrate 2 to remove slack.The substrate processing apparatus 30 has a substrate processing unit 25 disposed in the base material processing region 20 of the substrate feed apparatus 1, and it is possible to perform high-precision processing and processing to the substrate 2 having slack removed.Diagram