Beam scanning field calibration method

摘要

Problem to be solved: to provide a beam scanning field calibration method.To generate a calibration build pattern on the substrateAn individual beam steering mechanism is used to guide two or more radiant energy beams.The calibration build pattern isContains at least one measurement artifact generated by each of the two or more radiant energy beams;Determine the position of the measured artifact andTo identify alignment errorsThe measured position of the measured artifacts is compared with the standard.At least one of the beam steering mechanisms is adjusted to compensate the alignment error.Diagram