SCANNING WIDTH CALIBRATION METHOD OF CHARGED PARTICLE BEAM, MICROSCOPIC DEVICE USING CHARGED PARTICLE BEAM, AND SAMPLE FOR CHARGED PARTICLE BEAM CALIBRATION

摘要

PROBLEM TO BE SOLVED: To accurately calibrate the scanning width of a charged particle beam when a minute area on a sample is scanned with the charged particle beam.;SOLUTION: In this scanning width calibration method of a charged particle beam in a microscopic device, a sample 15 disposed in a sample chamber is scanned with the charged particle beam 1; thereby a beam scanned image on the sample surface is acquired; a probe 7 of a probing mechanism 23 installed in the sample chamber is scanned on the sample 15; and thereby a probe scanned image on the sample surface is acquired. The scanned distance of the probe 7 is detected based on the beam scanned image; the scanned distance of the probe is detected based on the probe scanned image; both the detected scanned distances are compared with each other; and the scanning width of the charged particle beam is calibrated based on the comparison result therefrom.;COPYRIGHT: (C)2006,JPO&NCIPI