System and method for interchangeable illumination filter set used in structured illumination imaging system

摘要

An apparatus for generating a structured illumination image includes illumination from an illumination source such that a housing and a pattern of light mounted in the housing corresponding to a pattern on a photomask is projected onto the sample. Imaging optics configured to focus, a reflector mounted within the housing and configured to reflect illumination to the sample, and allows only radiation from the illuminated sample to pass through the sensor A filter device including one or more filters mounted in the housing and configured to allow the device to be installed in the imaging system. . [Selection] Figure 1