Flying-over beam pattern scanning hologram microscopy using scan mirror and translation stage

摘要

The present invention relates to a flying over beam pattern scanning holographic microscope apparatus using a scanning mirror and a translation stage. According to the present invention, the phase of the first beam divided by the light source is modulated and converted into a first spherical wave through a first lens, and the second beam is converted into a second spherical wave through a second lens. 2 A scan beam generator that forms a scan beam by interfering with a spherical wave, and a scan that controls the incident scan beam in a horizontal direction to control the scanning position of the scan beam with respect to an object in a horizontal direction and transmits it to the projection unit. A scanning unit including a mirror and a translation stage for moving the object in a vertical direction at a rear end of the projection unit, and a plurality of lens systems and an objective lens, and a scan beam received from the scanning unit is located at the location of the object. A projection unit that projects to the object surface, and a condensing unit that detects a beam that has passed through the objective lens after being reflected or fluorescently reflected from the object, and the scan beam projected to the object surface is formed by the scanning mirror. It provides a flying over beam pattern scanning hologram microscope apparatus having a different pattern according to each focal position of the first and second spherical waves and the conical angle condition. According to the present invention, it is possible to implement a high-resolution scanning holographic microscope at high speed.