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MASK-FREE PHOTOLITHOGRAPHY USING METASTABLE UNDERCOOLED METAL PARTICLES
MASK-FREE PHOTOLITHOGRAPHY USING METASTABLE UNDERCOOLED METAL PARTICLES
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机译:使用亚稳金属颗粒的无掩盖光刻法
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摘要
Various embodiments relate to forming particles using undercooled metal particles in response to focused low power laser light. Particle growth can be initiated by utilizing the metastable and liquid nature of the particles, allowing for surface instability promoted by the laser light to induce liquid flow to translate to a neighboring particle. This event can cascade radially leading to accumulation of the liquid metal at the epicenter. The grown solidified particle size can be varied by using different power, exposure time, or working distance. Once the liquid has accumulated into a single region, it eventually solidifies either through homogeneous or heterogeneous nucleation to give a solid particle of larger size than the original. Such a method can be used to print patterns on a surface in four dimensions, where the fourth dimension (4D) is attained through gradient in size of the particles made. Additional systems and methods are disclosed.
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