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MASK-FREE PHOTOLITHOGRAPHY USING METASTABLE UNDERCOOLED METAL PARTICLES

机译:使用亚稳金属颗粒的无掩盖光刻法

摘要

Various embodiments relate to forming particles using undercooled metal particles in response to focused low power laser light. Particle growth can be initiated by utilizing the metastable and liquid nature of the particles, allowing for surface instability promoted by the laser light to induce liquid flow to translate to a neighboring particle. This event can cascade radially leading to accumulation of the liquid metal at the epicenter. The grown solidified particle size can be varied by using different power, exposure time, or working distance. Once the liquid has accumulated into a single region, it eventually solidifies either through homogeneous or heterogeneous nucleation to give a solid particle of larger size than the original. Such a method can be used to print patterns on a surface in four dimensions, where the fourth dimension (4D) is attained through gradient in size of the particles made. Additional systems and methods are disclosed.
机译:各种实施例涉及使用过冷金属颗粒的形成颗粒,响应于聚焦的低功率激光。通过利用颗粒的稳定性和液体性质可以引发颗粒生长,从而允许通过激光促进的表面不稳定,诱导液体流动转换为相邻颗粒。该事件可以径向径向导致初始化液体金属积聚。可以通过使用不同的功率,曝光时间或工作距离来改变生长的固化粒径。一旦液体积聚到单个区域中,它最终通过均匀或异质成核来凝固,得到比原始尺寸更大的固体颗粒。这种方法可用于在四维表面上打印图案,其中第四尺寸(4d)通过梯度达到所制作的粒子的尺寸。公开了额外的系统和方法。

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