How to start the vacuum exhaust device and the vacuum exhaust device

摘要

PROBLEM TO BE SOLVED: To provide a vacuum exhaust device having excellent operability, which does not require a preparatory work of storing a chamber volume in advance. SOLUTION: The vacuum exhaust device 1 has a predetermined pressure P1 in which the pressure on the intake port side of the auxiliary pump 20 is higher than the startable pressure P2 of the turbo molecular pump from the start of the turbo molecular pump 10, the auxiliary pump 20, and the auxiliary pump 20. Based on the pressure switch 30 and the time measuring unit 413 as the measuring unit for measuring the elapsed time t1 until the time becomes, and the measured elapsed time t1, the pressure on the intake port side can be started from the start of the auxiliary pump 20. It includes a calculation unit 411 that calculates the elapsed time t2 until the pressure P2 is reached, and a start control unit 412 that starts the turbo molecular pump 10 when the elapsed time t2 has elapsed from the start of the auxiliary pump 20. [Selection diagram] Fig. 1