Highly-Sensitive Capacitive-Type Pressure Sensor for Detection of Motion Embedded into Automatic Safety Shutdown System of Cutting Process Equipment

摘要

In the present embodiments, a porous dielectric is formed based on a low temperature solution process, and a flexible electrode pair containing a polymer binder is formed based on a low temperature solution process, and excellent performance is achieved in both high and low pressure regions by adjusting the thickness of the porous dielectric. We propose a capacitive pressure sensor and its manufacturing method that can be secured and standardized so that it can be applied to an automatic safety stop system of cutting/cutting process equipment.