Disposal system according to wastewater discharge characteristics in each process of semiconductor facilities

摘要

The present invention contains TMAH including a pH adjustment tank in which wastewater is introduced to adjust the pH, an aeration tank in which TMAH (tetramethyl ammonium hydroxide) degradable microorganisms are embedded to remove TMAH from the wastewater, and a filter that maintains a high concentration of microorganisms that decompose TMAH Wastewater treatment unit; Regarding a treatment system according to characteristics of wastewater discharged from each process of a semiconductor facility, comprising: a nitrogen-containing wastewater treatment unit that allows wastewater to be introduced from the TMAH-containing wastewater treatment unit to perform physicochemical removal or biological removal of nitrogen. will be.