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COATED CUTTING TOOL FOR MACHINING TITANIUM ALLOY AND HIGH-TEMPERATURE ALLOY AND PREPARATION METHOD THEREFOR
COATED CUTTING TOOL FOR MACHINING TITANIUM ALLOY AND HIGH-TEMPERATURE ALLOY AND PREPARATION METHOD THEREFOR
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机译:用于加工钛合金和高温合金的涂层切削工具及其制备方法
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摘要
Disclosed are a coated cutting tool for machining a titanium alloy and a high-temperature alloy and a preparation method therefor. The coating of the coated cutting tool is a Me-B-N coating. The preparation method for the coated cutting tool for machining a titanium alloy and a high-temperature alloy comprises the following steps: carrying out a substrate pre-treatment step, wherein the cutting tool is cleaned and dried, and is then fed into a chamber; carrying out a chamber vacuumizing step, specifically, carrying out vacuumizing by means of a mechanical pump and a molecular pump; carrying out an ion etching step, wherein high-purity Ar is introduced into the chamber, the temperature of a heater in the chamber is maintained, a negative bias voltage is applied, ion etching is carried out on a substrate, and oxide skin and a loose layer on the surface of the cutting tool are removed; carrying out an Me-B-N series coating deposition step, wherein high-purity N2 and high-purity Ar are continuously introduced into the chamber, meanwhile, the temperature of the heater in the chamber is kept constant, a negative bias voltage is applied to the substrate, and the Me-B-N series coating with a certain thickness is deposited by using a magnetron sputtering technique or an arc plasma technique; and carrying out a cooling and sampling step, wherein a furnace body circulating cooling system is started, the chamber is opened after the chamber is cooled in a vacuum state, and a workpiece is taken out.
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