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COATED CUTTING TOOL FOR MACHINING TITANIUM ALLOY AND HIGH-TEMPERATURE ALLOY AND PREPARATION METHOD THEREFOR

机译:用于加工钛合金和高温合金的涂层切削工具及其制备方法

摘要

Disclosed are a coated cutting tool for machining a titanium alloy and a high-temperature alloy and a preparation method therefor. The coating of the coated cutting tool is a Me-B-N coating. The preparation method for the coated cutting tool for machining a titanium alloy and a high-temperature alloy comprises the following steps: carrying out a substrate pre-treatment step, wherein the cutting tool is cleaned and dried, and is then fed into a chamber; carrying out a chamber vacuumizing step, specifically, carrying out vacuumizing by means of a mechanical pump and a molecular pump; carrying out an ion etching step, wherein high-purity Ar is introduced into the chamber, the temperature of a heater in the chamber is maintained, a negative bias voltage is applied, ion etching is carried out on a substrate, and oxide skin and a loose layer on the surface of the cutting tool are removed; carrying out an Me-B-N series coating deposition step, wherein high-purity N2 and high-purity Ar are continuously introduced into the chamber, meanwhile, the temperature of the heater in the chamber is kept constant, a negative bias voltage is applied to the substrate, and the Me-B-N series coating with a certain thickness is deposited by using a magnetron sputtering technique or an arc plasma technique; and carrying out a cooling and sampling step, wherein a furnace body circulating cooling system is started, the chamber is opened after the chamber is cooled in a vacuum state, and a workpiece is taken out.
机译:公开了一种用于加工钛合金和高温合金的涂层切削工具及其制备方法。涂覆的切削工具的涂层是Me-B-N涂层。用于加工钛合金的涂覆切削工具的制备方法和高温合金包括以下步骤:进行基板预处理步骤,其中切割工具被清洁并干燥,然后加入腔室中;具体地,通过机械泵和分子泵进行腔室吸尘步骤。执行离子蚀刻步骤,其中将高纯度AR引入腔室中,保持腔室中的加热器的温度,施加负偏置电压,在基板上进行离子蚀刻,以及氧化物皮肤和氧化物切割工具表面上的松散层;执行ME-BN系列涂层沉积步骤,其中高纯度N2和高纯度Ar连续地引入腔室中,同时,腔室中加热器的温度保持恒定,施加负偏压电压通过使用磁控溅射技术或电弧等离子体技术沉积具有一定厚度的ME-BN系列涂层;并执行冷却和采样步骤,其中启动炉体循环冷却系统,在腔室在真空状态冷却后打开腔室,并取出工件。

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