CONTAINER FOR STORING SLURRY HAVING FUMED SILICA PARTICLES AND CMP APPARATUS HAVING THE SAME

摘要

The present disclosure provides a container for storing slurry having fumed silica particles. The container includes a main body having an inner space for accommodating the slurry, and a filter disposed in the inner space of the main body. The filter is a porous membrane having a plurality of pores. The filter has an upper surface and a bottom surface. The plurality of pores has a pore size distribution decreasing from the upper surface to the bottom surface.