WAVEFRONT RECONSTRUCTION DEVICE AND METHOD BASED ON EXTENDED ROTATIONALLY SYMMETRIC STRUCTURED LIGHT ILLUMINATION

摘要

Disclosed is a wavefront reconstruction device based on extended rotationally symmetric structured light illumination. The device comprises a laser (1), an attenuation mirror (2), a microscope objective lens (3), a pinhole (4), a collimating lens (5), a beam splitter prism (6), a spatial light modulator (7), a lens (8) to be measured, and an image acquisition device (9) that are sequentially arranged. Further provided is a wavefront reconstruction method based on extended rotationally symmetric structured light illumination. According to the method, a spatial light modulator is used to modulate incident parallel light into structured light similar to a phase grating; a modulation pattern of the spatial light modulator is changed, and the characteristic that a pixel unit of the spatial light modulator is not infinitely small is used, such that the spatial light modulator is made to generate different structured light; diffraction light spots are collected on a focal plane, and a target surface and a structured light surface are updated at the same time by using an algorithm, such that not only is a target to be measured recovered, a real structured light wavefront is also recovered, thereby avoiding a recovery error caused by inaccurate known structured light information.