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AN EXTREMUM SEEKING CONTROL APPARATUS AND METHOD FOR AUTOMATIC FREQUENCY TUNING FOR RF IMPEDANCE MATCHING
AN EXTREMUM SEEKING CONTROL APPARATUS AND METHOD FOR AUTOMATIC FREQUENCY TUNING FOR RF IMPEDANCE MATCHING
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机译:RF阻抗匹配的自动频率调谐的极值寻求控制装置和方法
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摘要
A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.
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