Analysts, analysis methods, interference measurement systems, and programs

摘要

PROBLEM TO BE SOLVED: To analyze an interference image of a laser interferometer by simply reducing the influence of a phase shift error. SOLUTION: An acquisition unit that acquires a plurality of interference images based on a plurality of optical path lengths between a reference surface and a surface of a measurement object from an interference measurement device, and a sine wave of an interference signal for each pixel in the plurality of interference images. The calculation unit that calculates the component and the chord wave component, respectively, detects the error between the first sine wave component and the ideal second lisage figure constructed based on the sine wave component and the chord wave component for each pixel. An error detection unit, a correction unit that corrects the sine wave component and chord wave component for each pixel based on the error, and a shape that calculates the surface shape of the object to be measured based on the corrected sine wave component and chord wave component. An analysis device including a calculation unit is provided. [Selection diagram] Fig. 2