Analysts, analysis methods, interference measurement systems, and programs

摘要

PROBLEM TO BE SOLVED: To provide a wavelength scanning interferometer capable of measuring unevenness of a measurement object with high accuracy even if the wavelength range of a light source is expanded to the extent that the light intensity level of interference light fluctuates. SOLUTION: An acquisition unit that acquires a plurality of interference images based on light of a plurality of different wavelengths from an interference measuring device, and a non-interference component included in an interference signal for each pixel in the plurality of interference images are removed to remove the interference component. The phase gradient of the wavelength of the light irradiating the reference surface and the surface of the object to be measured is specified based on the output removal unit, the conversion unit that generates an analysis signal by Hilbert conversion of the interference component, and the interference component and the analysis signal. Therefore, an analysis device including a calculation unit for calculating the distance between the reference surface and the surface of the object to be measured is provided. [Selection diagram] Fig. 2