METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED DEVICES, METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES, AND APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES

摘要

The present disclosure provides a method 100 for cleaning a vacuum system used in the manufacture of OLED devices. The method 100 includes performing a pre-clean to clean at least a portion of the vacuum system, and performing a plasma clean using a remote plasma source.