首页> 外国专利> A semiconductor wafer alignment marking method and a semiconductor package having alignment marking portions

A semiconductor wafer alignment marking method and a semiconductor package having alignment marking portions

机译:半导体晶片对准标记方法和具有对准标记部分的半导体封装

摘要

Some embodiments include a semiconductor package. The semiconductor package has a semiconductor die having a main region containing an integrated circuit and an edge region containing a portion of an alignment mark location. This portion of the alignment mark position comprises a segment of the alignment mark. The alignment mark includes a pattern of lines and spaces, the lines extending along a first direction. The portion of the alignment mark position also includes a texture having a pattern other than lines extending along either a first direction or a second direction substantially orthogonal to the first direction. Some embodiments include methods for alignment marking of semiconductor wafers.
机译:一些实施例包括半导体封装。半导体封装具有具有包含集成电路的主区域的半导体管芯和包含对准标记位置的一部分的边缘区域。对准标记位置的这部分包括对准标记的一段。对准标记包括线条和空间的图案,线沿第一方向延伸。对准标记位置的部分还包括具有除沿第一方向或基本正交的第二方向延伸的线之外的图案的纹理。一些实施例包括用于对准半导体晶片的标记的方法。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号