An X-ray machine, an X-ray source and an X-ray system are provided. The X-ray apparatus shall contain a heat-conducting substrate with a surface and at least one structure on or embedded in at least one section of the surface. At least one structure contains a heat-conducting first material which is thermally linked to the substrate. The first material has a length along a first direction parallel to the section of the surface in an area greater than 1 millimeter and a width along a second direction parallel to the section of the topsurface and perpendicular to the first direction. The width is in an area of 0,2 millimeters to 3 millimeters. The structure shall also include at least one layer above the first material. At least one layer includes at least one second materialwhich differs from the first material. At least one layer has a thickness in an area of two micrometers to 50 micrometers. At least one second material is configured to generate X-rays in the event of electron radiation with energies in an energy range of 0.5 keV to 160 keV.
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