Sample tilt correction device and sample tilt correction method

摘要

[Purpose] The present invention relates to an automatic sample tilt correction device and an automatic sample tilt correction method for automatically correcting a sample tilt, in which the height of a sample is precisely measured by a charged particle beam device to set the tilt, and the tilt is set. The purpose is to realize high-speed, precise and reliable autofocus. [Structure] A stage that holds a sample or a sample holder containing a sample and corrects the inclination of the sample or the sample holder containing the sample in the height direction, and any three or more points of the sample fixed on the stage. A height measuring device that measures the height and a height measuring device measure the inclination of the sample fixed on the stage in the height direction, and the height direction of the stage is set so that the inclination in the height direction becomes zero. It is provided with a height correction means for adjusting the above. [Selection diagram] Fig. 1