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HYDROGEN GENERATOR FOR AN ION IMPLANTER

机译:用于离子注入机的氢气发生器

摘要

A terminal for an ion implantation system is provided, wherein the terminal has a terminal housing for supporting an ion source configured to form an ion beam. A gas box within the terminal housing has a hydrogen generator configured to produce hydrogen gas for the ion source. The gas box is electrically insulated from the terminal housing, and is further electrically coupled to the ion source. The ion source and gas box are electrically isolated from the terminal housing by a plurality of electrical insulators. A plurality of insulating standoffs electrically isolate the terminal housing from an earth ground. A terminal power supply electrically biases the terminal housing to a terminal potential with respect to the earth ground. An ion source power supply electrically biases the ion source to an ion source potential with respect to the terminal potential. Electrically conductive tubing electrically couples the gas box and ion source.
机译:提供用于离子注入系统的终端,其中,所述终端具有用于支撑被配置为形成离子束的离子源的端子壳体。端子壳体内的气体盒具有氢气发生器,该发电机被配置为为离子源生产氢气。气体箱与端子壳体电绝缘,并且进一步电耦合到离子源。离子源和气体箱通过多个电绝缘体从端子壳体电隔离。多个绝缘支架将端子壳体与地球接地电隔离。终端电源将端子壳体电偏置到相对于地面地面的终端电位。离子源电源相对于终端电位将离子源电极偏置到离子源电位。导电管电极耦合气体盒和离子源。

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