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WORKPIECE CUTTING METHOD

机译:工件切割方法

摘要

An object of the present invention is to provide a method for cutting a workpiece capable of accurately aligning a cutting position. The present invention provides a chuck table, a cutting means for cutting a workpiece with a cutting blade fixed to the spindle, a moving means for relatively moving the chuck table and the cutting means in the perpendicular X and Y directions, and an optical system in which a reference line is formed. A cutting method of a cutting device having an imaging means and a control means, comprising: a dressing step of dressing a cutting blade at a first spindle rotation speed, and a dressing board at a second spindle rotation speed before or after the dressing step. A groove forming step of forming a groove for positioning by cutting abnormally, a reference distance registration step of registering the distance between the groove for positioning and a reference line, and a cutting position in which the cutting position is set by matching the reference line to the line to be divided of the workpiece And a setting step and a cutting step of cutting the workpiece at a second spindle rotation speed.
机译:本发明的目的是提供一种用于切割能够精确地对准切割位置的工件的方法。本发明提供一种卡盘台,切割装置,用于将工件用固定到主轴固定的切割刀片的切割装置,用于相对移动卡盘台的移动装置和在垂直x和y方向上的切割装置,以及光学系统形成参考线。一种切割装置的切割方法,其具有成像装置和控制装置,包括:在敷料步骤之前或之后,在第一主轴转速,在第二主轴转速下敷料板敷形成切割刀片的敷料步骤。通过异常切割形成用于定位的凹槽的凹槽形成步骤,通过将参考线与参考线与参考线匹配来设置切割位置的凹槽之间的距离的参考距离登记步骤。将待划分工件的线和设置步骤以及切割工件以第二主轴转速切割的切割步骤。

著录项

  • 公开/公告号KR102228487B1

    专利类型

  • 公开/公告日2021-03-15

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR1020170030446

  • 发明设计人 노리즈미 다이고;

    申请日2017-03-10

  • 分类号H01L21/78;B28D5/02;B28D7;H01L21/66;H01L21/67;

  • 国家 KR

  • 入库时间 2022-08-24 17:42:16

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