公开/公告号WO2021043593A1
专利类型
公开/公告日2021-03-11
原文格式PDF
申请/专利权人 ASML NETHERLANDS B.V.;
申请/专利号WO2020EP73422
发明设计人 GÖTZ PETER MAXIMILIAN;TEUNISSEN PAULUS ANTONIUS ANDREAS;AJGAONKAR MAHESH UPENDRA;BAUERSCHMIDT SEBASTIAN THOMAS;UEBEL PATRICK SEBASTIAN;HUGERS RONALD FRANCISCUS HERMAN;BOER JAN ADRIANUS;BOS EDWIN JOHANNES CORNELIS;BROUNS ANDREAS JOHANNES ANTONIUS;PROSYENTSOV VITALIY;SCHOLTES - VAN EIJK PAUL WILLIAM;
申请日2020-08-20
分类号G02F1/365;G02B6/02;
国家 EP
入库时间 2022-08-24 17:41:37