ADJUSTMENT DEVICE FOR OPTICAL AXIS AND METHOD FOR DETERMINING AN OPTICAL AXIS OF A LASER PROCESSING DEVICE

摘要

There is provided an optical axis adjusting device comprising: a flat parallel-surface plate having an upper surface and a lower surface with reflective sheets disposed thereon, respectively, and an image pickup unit disposed below the flat parallel-surface plate for picking up an image of a laser beam applied thereto. The flat parallel surface plate is made of a material that is transmissive to a wavelength of the laser beam. The laser beam is applied to the image pickup unit through the flat parallel surface plate. An inclination of the optical axis of the laser beam is detected based on the shape of the beam spot of the laser beam whose image was picked up by the image pickup unit.