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GERMANIUM BASED FOCAL PLANE ARRAY FOR THE SHORT INFRARED SPECTRAL REGIME
GERMANIUM BASED FOCAL PLANE ARRAY FOR THE SHORT INFRARED SPECTRAL REGIME
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机译:用于短红外光谱制度的锗基焦平面阵列
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摘要
Light detecting structures comprising a Si base having a pyramidal shape with a wide incoming light-facing pyramid bottom and a narrower pyramid top and a Ge photodiode formed on the Si pyramid top, wherein the Ge photodiode is operable to detect light in the short wavelength infrared range, and methods for forming such structures. A light detecting structure as above may be repeated spatially and fabricated in the form of a focal plane array of Ge photodetectors on silicon.
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